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  1. Plasma and Ion Beam Technologies

    Oxford Plasma Technology homepage: Plasma Etching (RIE, PE), Plasma Deposition (PECVD, remote PECVD), Sputtering, Ion Beam Etching (IBE, RIBE, CAIBE), Ion Beam ...
    Plasma2
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    MEMS1
    ICP1
    photonics1
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    thin film1
    ECR1
    optoelectronics1
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    Dry Etching1
    micromechanics1
    Plasma Etching1
    Photoresist stripping1
    CAIBE1
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    optical waveguides1
    remote plasma0

    www.oxfordplasma.de - 2009-04-10

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